Euv Tech INC
At a glance
Employees100-499
In business since1997
HeadquartersMartinez, CA
SAM.gov UEIKTH6CJAA2TT1
EUV Tech produces at-wavelength extreme ultraviolet metrology tools and supplies the semiconductor manufacturing industry with metrology solutions using extreme ultraviolet light and soft-x-ray technology. The company offers the Lithometrix SuMMIT Software Suite for line-edge roughness, line-width roughness, and critical dimension analysis of SEM images, and provides in-house measurement services for its EUV metrology products.
Summarized from the company’s own website
Their plant
| Facility | City | State | Employees | Status |
|---|---|---|---|---|
| Euv Tech INC | Martinez | CA | 100–499 | ACTIVE |
Compiled from federal records — EPA, OSHA, SAM.gov and the U.S. Census — and from the company’s own website. Federal source data is public domain. Each plant’s page names the source of every field.


