Onto Innovation INC
At a glance
EmployeesNot reported
In business sinceNot reported
HeadquartersWilmington, MA
US patents45
SAM.gov UEIK41YV73EPTH9
CAGE code62055
Incorporated inDE
LEI254900RXZVN73CHOO062
Brands
This company sells these brands.
- semiconductor manufacturing
- high-speed inspection
- wafers
- panels
- CMOS technologies
- advanced packaging
- technical training
- packaging applications center
Named on the company’s own website, read JUL 29, 2026
Open positions
Openings read from Onto Innovation INC’s own job board on Workday, last checked OCT 23, 2026. FactoryRegistry does not host applications — each title opens the posting where the company published it.
- Senior Systems EngineerMilpitas-CA · posted OCT 23, 2026
- Applications Engineer 2Hwasung-Korea · posted OCT 23, 2026
- Field Service Engineer 1Chungju-Korea · posted OCT 23, 2026
- Senior Systems EngineerHillsboro-OR · posted OCT 23, 2026
- Senior Systems EngineerMilpitas-CA · posted OCT 23, 2026
- Senior Systems EngineerMilpitas-CA · posted OCT 23, 2026
- Staff Applications EngineerHsinchu-Taiwan · posted OCT 23, 2026
- Field Service Engineer 2Hsinchu-Taiwan · posted OCT 23, 2026
- Field Service Engineer 2Hsinchu-Taiwan · posted OCT 23, 2026
- Applications Engineer 2Taichung-Taiwan · posted OCT 23, 2026
195 more on the company’s board
Supplier designations
For Profit OrganizationManufacturer of Goods
Self-certified by the company in its SAM.gov registration
Patents
45 US patents granted 2020–2025, 40 of them in the five years to SEP 2025.
Measurement 31Optics 6Semiconductors 3Computer technology 3Audio-visual technology 1
- Multi-layer calibration for empirical overlay measurementUS 12,386,271 · granted AUG 12, 2025
- Low contrast non-referential defect detectionUS 12,354,254 · granted JUL 8, 2025
- Simultaneous back and/or front and/or bulk defect detectionUS 12,339,235 · granted JUN 24, 2025
- Mitigation of undesired spectral effects in optical metrologyUS 12,259,338 · granted MAR 25, 2025
- Area camera substrate pre-alignerUS 12,237,198 · granted FEB 25, 2025
Newest 5 shown · Granted to Onto Innovation Inc. · PatentsView (USPTO), data through SEP 30, 2025 · CC BY 4.0
Their plant
| Facility | City | State | Employees | Status |
|---|---|---|---|---|
| Onto Innovation INC | Wilmington | MA | — | ACTIVE |
Compiled from federal records — EPA, OSHA, SAM.gov and the U.S. Census — and from the company’s own website. Federal source data is public domain. Each plant’s page names the source of every field.

