Wafer Process Systems INC

What they make

• wet benches
• chemical blend systems
• modifications
• repairs
• existing equipment
• upgrades
• semiconductor
• MEMS
• fabrication
• photonics
• solar cell

NAMED ON THE COMPANY’S OWN WEBSITE, READ JUL 29, 2026

Where it is

Other plants nearby

Facility	City	Industry	Status	Distance
Hastest Solutions, INC	San Jose	Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables 334513	● ACTIVE	3.5 KM
NNNo Name Precision, LLC	San Jose	Machine Shops 332710	◐ LIKELY ACTIVE	4.1 KM
SMSPT Microtechnologies USA	San Jose	Semiconductor Machinery Manufacturing 333242	◐ LIKELY ACTIVE	5.9 KM
Sima Technologies, INC	San Jose	Semiconductor Machinery Manufacturing 333242	● ACTIVE	6.7 KM
SBSharp Box Precision LLC	San Jose	Machine Shops 332710	◐ LIKELY ACTIVE	6.6 KM

Every listed plant in Santa Clara County

Also at this address

No other federal record shares this street address.

Where this record comes from

3 sources hold this plant, and 11 fields on this page come from them. Each line is one agency’s own record of it: the identifier it is filed under, whether that record shows the plant operating or only that it exists, and when the register first and last saw it there.

• The company’s own websiteOPERATING
  first seen JUL 2026 · last seen OCT 2026
• SAM.gov entity registrationOPERATING
  Record CTC6XF8AFR71 · first seen OCT 2025 · last seen SEP 2026
• SBA Paycheck Protection Program loan recordsEXISTENCE
  Record CA|san jose|3641 charter park dr · first seen JUL 2020 · last seen JUL 2020

IN SANTA CLARA COUNTY86 other plants share this one’s industry (Industrial Machinery Manufacturing, NAICS 3332); 15 of them have a size band on record.

What each source says

Every field below, as each source filed it. The value this page shows is marked; where the sources disagree, the field says so. Status is computed from independent sources; nothing here is self-reported unless marked Claimed.

Name

SAM.gov: WAFER PROCESS SYSTEMS INC · SEP 2026

Street address

SAM.gov: 3641 CHARTER PARK DR · SEP 2026

City

SAM.gov: SAN JOSE · SEP 2026

State

SAM.gov: CA · SEP 2026

Coordinates

Census geocoder: 37.278755202327,-121.850277241333 · JUL 2026

Employees (band)

SBA PPP: 1-19 · JUL 2020

Website

SAM.gov: http://www.waferprocess.com · SEP 2026

Year established

Company website: 1983 · AUG 2026

CAGE code

SAM.gov: 07LE9 · SEP 2026

PPP loan

SBA PPP: PPP loan x1, approved 2020-07-09, 6 jobs reported · JUL 2020

SAM registration expires

SAM.gov: 2027-09-29 · SEP 2026