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Entegris INC

845 Enterprise Dr, Aurora, IL 60504

ACTIVELAST SEEN IN FEDERAL DATA FEB 2026 · 3 SOURCES

Operating signal within 12 months from two or more independent sources.

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What they make

Semiconductor and Related Device Manufacturing334413

Where it is

41.77251, -88.22587 · CENSUS TIGER
COUNTY
METRO AREA
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STREET VIEW

Other plants nearby

FacilityCityIndustryStatusDistance
EntegrisAuroraSemiconductor and Related Device Manufacturing
334413
LIKELY ACTIVE0.3 KM
Cabot Microelectronics CORPAuroraPolish and Other Sanitation Good Manufacturing
325612
UNVERIFIED0.9 KM
Pritel INCNapervilleOther Communications Equipment Manufacturing
334290
REPORTED CLOSED1.3 KM
Smt LLC GroupNapervilleCurrent-Carrying Wiring Device Manufacturing
335931
ACTIVE2.4 KM
PCS NapervilleNapervilleOther Electronic Component Manufacturing
334419
LIKELY ACTIVE3.3 KM

Every listed plant in DuPage County

Also at this address

No other federal record shares this street address.

Where this record comes from

3 sources hold this plant, and 8 fields on this page come from them. Each line is one agency’s own record of it: the identifier it is filed under, whether that record shows the plant operating or only that it exists, and when the register first and last saw it there.

EPA cross-references this facility in ACES, AIR, AIRS/AFS, BR, EIS, OSHA-OIS, RCRAINFO, TSCA · EPA site type STATIONARY.

  • EPA ECHO compliance recordsOPERATING
    first seen FEB 2026 · last seen FEB 2026
  • OSHA injury and illness reportsOPERATING
    Record 1285433 · first seen DEC 2025 · last seen DEC 2025
  • EPA Facility Registry ServiceEXISTENCE
    Record 110002350722 · first seen OCT 2017 · last seen SEP 2023

IN DUPAGE COUNTY54 other plants share this one’s industry (Semiconductor and Other Electronic Component Manufacturing, NAICS 3344); 25 of them have a size band on record.

What each source says

Every field below, as each source filed it. The value this page shows is marked; where the sources disagree, the field says so. Status is computed from independent sources; nothing here is self-reported unless marked Claimed.

Name
EPA: ENTEGRIS INC · OCT 2026
Street address
EPA: 845 ENTERPRISE DR · OCT 2026
City
EPA: AURORA · OCT 2026
State
EPA: IL · OCT 2026
County (FIPS code)
EPA: 17043 · OCT 2026
Coordinates
EPA: 41.77251,-88.22587 · OCT 2026
Employees (band)
OSHA: 100-499 · DEC 2025
Hazardous waste generator (RCRA)
EPA ECHO: LQG · OCT 2026

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