Axcelis Technologies INC
Doing business as C. T. CORPORATION SYSTEM (Previous Legal)
At a glance
Employees500+
In business since2022
HeadquartersBeverly, MA
US patents401
SAM.gov UEIKGKCHNGRMMM7
CAGE code1TSM6
Incorporated inDE
LEI529900HF9B6NL1QG9F05
Brands
This company sells these brands.
- innovative ion implant systems vital
- semiconductor production
- ion implanters
- Purion platform
- advanced logic
- image sensors
- mature process technologies
- power devices
- global reach
- regions
Named on the company’s own website, read JUL 29, 2026
Open positions
Openings read from Axcelis Technologies INC’s own job board on Workday, last checked OCT 25, 2026. FactoryRegistry does not host applications — each title opens the posting where the company published it.
- Applications EngineerDongtan, Korea · posted OCT 23, 2026
- Director, HR Technology (remote)Axcelis Technologies INC · Beverly, MA · posted OCT 22, 2026
- Eng Sales SnrAxcelis Technologies INC · Beverly, MA · posted OCT 20, 2026
- Field Final TestDongtan, Korea · posted OCT 20, 2026
- Field Final TestDongtan, Korea · posted OCT 20, 2026
- Field FInal TestDongtan, Korea · posted OCT 20, 2026
- Field Final TestDongtan, Korea · posted OCT 20, 2026
- Field Final TestDongtan, Korea · posted OCT 20, 2026
- Field Final TestDongtan, Korea · posted OCT 20, 2026
- Field Service EngineerShanghai, China · posted OCT 16, 2026
77 more on the company’s board
Supplier designations
For Profit OrganizationManufacturer of Goods
Self-certified by the company in its SAM.gov registration
Patents
401 US patents granted 2000–2025, 33 of them in the five years to SEP 2025.
Electrical machinery, apparatus, energy 244Semiconductors 111Measurement 13Chemical engineering 10Surface technology, coating 9
- High energy implanter with small footprintUS 12,431,332 · granted SEP 30, 2025
- Method for setting gap between cathode and filamentUS 12,354,834 · granted JUL 8, 2025
- Hydraulic feed system for an ion sourceUS 12,154,763 · granted NOV 26, 2024
- Dual source injector with switchable analyzing magnetUS 12,112,918 · granted OCT 8, 2024
- Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beamUS 12,051,561 · granted JUL 30, 2024
Newest 5 shown · Granted to Axcelis Technologies, Inc. · PatentsView (USPTO), data through SEP 30, 2025 · CC BY 4.0
Their plant
| Facility | City | State | Employees | Status |
|---|---|---|---|---|
| Axcelis Technologies INC | Beverly | MA | 500+ | ACTIVE |
Compiled from federal records — EPA, OSHA, SAM.gov and the U.S. Census — and from the company’s own website. Federal source data is public domain. Each plant’s page names the source of every field.





