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Axcelis Technologies INC

108 Cherry Hill Dr, Beverly, MA 01915

ACTIVELAST SEEN IN FEDERAL DATA OCT 2026 · 4 SOURCES

Operating signal within 12 months from two or more independent sources.

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Homepage of Axcelis Technologies INC
Their homepage, crawled JUL 2026

What they make

Semiconductor Machinery Manufacturing333242
  • innovative ion implant systems vital
  • semiconductor production
  • ion implanters
  • Purion platform
  • advanced logic
  • image sensors
  • mature process technologies
  • power devices
  • global reach
  • regions

NAMED ON THE COMPANY’S OWN WEBSITE, READ JUL 29, 2026

Products

Made or handled here · 5
gsd ovation · medium energy · purion h high current ion implantation · purion ion implantation equipment · purion m mid current ion implantation
Where these came from
5 from the company’s own website · Company website
url-slug on https://www.axcelis.com/products/gsd-ovation/

Open positions

Openings read from Axcelis Technologies INC’s own job board on Workday, last checked OCT 25, 2026. FactoryRegistry does not host applications — each title opens the posting where the company published it.

OTHER OPENINGS AT AXCELIS TECHNOLOGIES INC, NOT MATCHED TO THIS PLANT

67 more on the company’s board

Where it is

42.57500, -70.90723 · CENSUS TIGER
COUNTY
METRO AREA
ON GOOGLE MAPS

Other plants nearby

FacilityCityIndustryStatusDistance
108 Cherry Hill DriveBeverlySemiconductor Machinery Manufacturing
333242
LIKELY ACTIVE0.2 KM
Emd Millipore CORP - Bioscience DivisionDanversIndustrial Machinery Manufacturing
333220
UNVERIFIED0.7 KM
105 Sam FonzoBevelrySemiconductor Machinery Manufacturing
333242
LIKELY ACTIVE1.0 KM
Emd Millipore CorporationDanversAll Other Miscellaneous Fabricated Metal Product Manufacturing
332999
UNVERIFIED0.8 KM
E. Mcgrath, INC.SalemAll Other Industrial Machinery Manufacturing
333248
ACTIVE5.2 KM

Every listed plant in Essex County

Also at this address

No other federal record shares this street address.

Where this record comes from

4 sources hold this plant, and 13 fields on this page come from them. Each line is one agency’s own record of it: the identifier it is filed under, whether that record shows the plant operating or only that it exists, and when the register first and last saw it there.

EPA cross-references this facility in AIR, AIRS/AFS, BR, EIS, ICIS, MA-EPICS, NPDES, RCRAINFO, TRIS, TSCA · EPA site type STATIONARY.

  • The company’s own websiteOPERATING
    first seen JUL 2026 · last seen OCT 2026
  • SAM.gov entity registrationOPERATING
    Record KGKCHNGRMMM7 · first seen JUN 2026 · last seen JUN 2026
  • DOL Form 5500 retirement plan filingsOPERATING
    Record 341818596|MA|01915|108 cherry hill dr · first seen DEC 2024 · last seen DEC 2024
  • EPA Facility Registry ServiceEXISTENCE
    Record 110012161230 · first seen MAR 2014 · last seen JUN 2017

ALSO RECORDED ASAXCELIS TECHNOLOGIES

IN ESSEX COUNTY31 other plants share this one’s industry (Industrial Machinery Manufacturing, NAICS 3332); 15 of them have a size band on record.

What each source says

Every field below, as each source filed it. The value this page shows is marked; where the sources disagree, the field says so. Status is computed from independent sources; nothing here is self-reported unless marked Claimed.

NameSOURCES DISAGREE
EPA: AXCELIS TECHNOLOGIES · JUL 2026
SAM.gov: AXCELIS TECHNOLOGIES INC · JUN 2026 · ON THIS PAGE
Street address
EPA: 108 CHERRY HILL DR · JUL 2026 · ON THIS PAGE
SAM.gov: 108 CHERRY HILL DR · JUN 2026 · ON THIS PAGE
City
EPA: BEVERLY · JUL 2026 · ON THIS PAGE
SAM.gov: BEVERLY · JUN 2026 · ON THIS PAGE
State
EPA: MA · JUL 2026 · ON THIS PAGE
SAM.gov: MA · JUN 2026 · ON THIS PAGE
County (FIPS code)
EPA: 25009 · SEP 2026
Coordinates
EPA: 42.575,-70.90723 · JUL 2026
Employees (band)
DOL: 500+ · DEC 2024
Website
SAM.gov: www.axcelis.com · JUN 2026
Year established
Company website: 2022 · SEP 2026
CAGE code
SAM.gov: 1TSM6 · JUN 2026
Retirement plan filing (Form 5500)
DOL: 1,046 active participants, plan year ending 2024-12-31, 2 plan(s) · DEC 2024
SAM registration expires
SAM.gov: 2027-06-02 · JUN 2026
State business registrationSOURCES DISAGREE
CO SOS: AXCELIS TECHNOLOGIES, INC., registered with the Colorado Secretary of State; Corporation formed in Delaware; registered 1996-09-18; active, annual report filed 2026-08-27 · AUG 2026
CT SOTS: AXCELIS TECHNOLOGIES, INC., registered with the Connecticut Secretary of the State; Corporation formed in Delaware; registered 2023-10-02; active, annual report filed 2026-09-02 · SEP 2026
Sunbiz: AXCELIS TECHNOLOGIES, INC., registered with the Florida Department of State, Division of Corporations; Corporation formed in Delaware; registered 1996-09-18; active, annual report filed 2026-03-05 · MAR 2026
MS SOS: AXCELIS TECHNOLOGIES, INC., registered with the Mississippi Secretary of State; Corporation; registered 2023-12-11; withdrawn · DEC 2023
OR SOS: AXCELIS TECHNOLOGIES, INC., registered with the Oregon Secretary of State, Corporation Division; Corporation formed in Delaware; registered 1996-09-18; active · SEP 1996
TX Comptroller: AXCELIS TECHNOLOGIES, INC., registered with the Texas Comptroller of Public Accounts; Corporation; registered 1996-09-18; active · SEP 1996
VA SCC: Axcelis Technologies, Inc., registered with the Virginia State Corporation Commission; Corporation formed in Delaware; registered 2003-01-31; active · JAN 2003

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