Ulvac Technologies INC
At a glance
Employees20-99
In business sinceNot reported
HeadquartersMethuen, MA
US patents5
SAM.gov UEIC6L1MN4P7RL9
CAGE code0XC78
Incorporated inDE
LEI549300D0Q5IXX0JPP325
- vacuum pumps
- film measurement
- semiconductor
- MEMS/IOT
Named on the company’s own website, read JUL 29, 2026
CareersCareers page — seen SEP 8, 2026
Supplier designations
For Profit Organization
Self-certified by the company in its SAM.gov registration
Patents
5 US patents granted 1998–2024, 2 of them in the five years to SEP 2025.
Semiconductors 3Electrical machinery, apparatus, energy 2
- Multifunctional engineered particle for a secondary battery and method of manufacturing the sameUS 12,021,229 · granted JUN 25, 2024
- Multifunctional engineered particle for a secondary battery and method of manufacturing the sameUS 11,894,547 · granted FEB 6, 2024
- Cleaning and stripping of photoresist from surfaces of semiconductor wafersUS 5,908,319 · granted JUN 1, 1999
- Processes for cleaning and stripping photoresist from surfaces of semiconductor wafersUS 5,882,489 · granted MAR 16, 1999
- Cold processes for cleaning and stripping photoresist from surfaces of semiconductor wafersUS 5,795,831 · granted AUG 18, 1998
Granted to ULVAC Technologies, Inc. · PatentsView (USPTO), data through SEP 30, 2025 · CC BY 4.0
Their plant
| Facility | City | State | Employees | Status |
|---|---|---|---|---|
| Ulvac Technologies INC | Methuen | MA | 20–99 | ACTIVE |
Compiled from federal records — EPA, OSHA, SAM.gov and the U.S. Census — and from the company’s own website. Federal source data is public domain. Each plant’s page names the source of every field.