Operating signal within 12 months from two or more independent sources.
What they make
Semiconductor Machinery Manufacturing333242- vacuum pumps
- film measurement
- semiconductor
- MEMS/IOT
NAMED ON THE COMPANY’S OWN WEBSITE, READ JUL 29, 2026
Products
Recorded against the company rather than this address. Federal award and drug records name the company, not the plant, so we cannot say which of its sites makes these.
Where these came from
Where it is
Other plants nearby
| Facility | City | Industry | Status | Distance |
|---|---|---|---|---|
| HQ Methuen | Methuen | Semiconductor Machinery Manufacturing 333242 | LIKELY ACTIVE | 0.0 KM |
| MKS Methuen | Methuen | Semiconductor Machinery Manufacturing 333242 | LIKELY ACTIVE | 0.7 KM |
| Mks INC. | Andover | Semiconductor Machinery Manufacturing 333242 | ACTIVE | 2.2 KM |
| MKS Shattuck Rd | Andover | Semiconductor Machinery Manufacturing 333242 | LIKELY ACTIVE | 2.5 KM |
| Mks Instruments INC | Andover | Semiconductor Machinery Manufacturing 333242 | UNVERIFIED | 2.5 KM |
Also at this address
No other federal record shares this street address.
Where this record comes from
4 sources hold this plant, and 12 fields on this page come from them. Each line is one agency’s own record of it: the identifier it is filed under, whether that record shows the plant operating or only that it exists, and when the register first and last saw it there.
EPA cross-references this facility in MA-EPICS, RCRAINFO · EPA site type STATIONARY.
- The company’s own websiteOPERATINGfirst seen JUL 2026 · last seen OCT 2026
- SAM.gov entity registrationOPERATINGRecord C6L1MN4P7RL9 · first seen JAN 2026 · last seen JAN 2026
- DOL Form 5500 retirement plan filingsOPERATINGRecord 132849301|MA|01844|401 griffin brook dr · first seen DEC 2024 · last seen DEC 2024
- EPA Facility Registry ServiceEXISTENCERecord 110024334380 · first seen OCT 2014 · last seen OCT 2014
IN ESSEX COUNTY31 other plants share this one’s industry (Industrial Machinery Manufacturing, NAICS 3332); 15 of them have a size band on record.
What each source says
Every field below, as each source filed it. The value this page shows is marked; where the sources disagree, the field says so. Status is computed from independent sources; nothing here is self-reported unless marked Claimed.
- Name
- EPA: ULVAC TECHNOLOGIES, INC. · JUL 2026 · ON THIS PAGE
- SAM.gov: ULVAC TECHNOLOGIES INC · JAN 2026 · ON THIS PAGE
- Street address
- EPA: 401 GRIFFIN BROOK DR · JUL 2026 · ON THIS PAGE
- SAM.gov: 401 GRIFFIN BROOK DR · JAN 2026 · ON THIS PAGE
- City
- EPA: METHUEN · JUL 2026 · ON THIS PAGE
- SAM.gov: METHUEN · JAN 2026 · ON THIS PAGE
- State
- EPA: MA · JUL 2026 · ON THIS PAGE
- SAM.gov: MA · JAN 2026 · ON THIS PAGE
- County (FIPS code)
- EPA: 25009 · SEP 2026
- Coordinates
- EPA: 42.69099,-71.23744 · JUL 2026
- Employees (band)
- DOL: 20-99 · DEC 2024
- Website
- SAM.gov: http://www.ulvac.com/ · JAN 2026
- CAGE code
- SAM.gov: 0XC78 · JAN 2026
- Retirement plan filing (Form 5500)
- DOL: 66 active participants, plan year ending 2024-12-31, 1 plan(s) · DEC 2024
- SAM registration expires
- SAM.gov: 2027-01-27 · JAN 2026
- State business registrationSOURCES DISAGREE
- MS SOS: ULVAC Technologies, Inc., registered with the Mississippi Secretary of State; Corporation; registered 2019-01-24; active · JAN 2019
- VA SCC: ULVAC Technologies, Inc., registered with the Virginia State Corporation Commission; Corporation formed in Delaware; registered 2011-04-04; active · APR 2011